I've been trying to decide whether to upgrade my PIII and if so what to replace it with.  I ran some benchmark tests for comparison to other results at 
http://benchmark.mameworld.net/header.htmlI've been using v102.  In some previous testing, I found that anything above v102 results in a drastic slowdown on the PIII.  I followed the guidelines at the site for MAME parameters.  I just eliminated the ones that aren't supported anymore.
I tried to find ROMs that had been tested against most of the other processors and selected the ones that I thought were borderline and would give good comparisons against other processors.  As a result, most of the ROMS I tested were challenging and the results tend to be lower than desired frame rates.
Hopefully this data will be useful to others.  I have another machine that I plan to test (Core 2 Duo E6300) and will post those results when I get around to it.
ROM  MAME Build  CPU  MHz  FPS  
1943  0.102  Intel Pentium III  933  136  
batrider  0.102  Intel Pentium III  933  62  
cbaj  0.102  Intel Pentium III  933  25  
crusnusa  0.102  Intel Pentium III  933  15  
dariusg  0.102  Intel Pentium III  933  28  
gdarius  0.102  Intel Pentium III  933  24  
kof99  0.102  Intel Pentium III  933  71  
mk  0.102  Intel Pentium III  933  47  
mslug3  0.102  Intel Pentium III  933  66  
nbajam  0.102  Intel Pentium III  933  40  
radm  0.102  Intel Pentium III  933  18  
rtype  0.102  Intel Pentium III  933  92  
sfex  0.102  Intel Pentium III  933  23  
ssf2t  0.102  Intel Pentium III  933  71  
starblad  0.102  Intel Pentium III  933  14  
stunrun  0.102  Intel Pentium III  933  41  
tekken  0.102  Intel Pentium III  933  22  
term2  0.102  Intel Pentium III  933  53